1.Introduction

Since the beginning of CVD diamond synthesis, faceted diamond layers, but frequently also half-spherical and poly crystalline diamond (ballas) were deposited. Ballas deposition is observed under “non-optimal” growing conditions. The CVD ballas layers were alsocalled cauliflower like, ball-shaped, etc. by some authors. Additionally during the last years nano-crystalline and ultra-nanocrystalline diamond films were described.

1．前言

自从CVD金刚石合成开始以来，不但沉积了多面金刚石涂层，而且还常常沉积半球形状的聚晶金刚石（半刚石）。在“非最佳”的生长条件下可沉积半刚石。 CVD半刚石涂层还被一些作者称作菜花形金刚石、球形金刚石等等。另外，近几年来对纳米晶和超纳米晶金刚石薄膜进行了描述。

Faceted diamond can be grown by various technigues and diamond growth can be obtained within a wide range of parameters (e.g. temperature range between 300 and 1000℃). All methods are primarily based on the generation of large amounts of atomic hydrogen and carbon radicals.

多面金刚石可通过各种方法形成，而且金刚石可在一个很宽的参数范围内生长（如温度范围为300~1000℃）。所有的方法首先要以大量原子态氢和碳基的产生为基础。

With increase of carbon supersaturation(e.g. CH4 amount in the gas phase)faceted diamonds get less and a high amount of twins and stacking faults are introduced into the deposited diamond. Finally radial growth of polycrystalline, unfaceted diamond having the “ballastype morphology” occurs.

随着碳的超饱和度（如气相中的甲烷含量）的增大，多面金刚石减少，大量的孪晶和堆垛层错进入沉积的金刚石中。最后，具有“半刚石型形貌”的非多面聚晶金刚石成径向生长。

Raman spectroscopy is the most freguently used technigue to characterize carbon bonding in diamond films, to distinguish between diamond, graphite and amorphous carbon is possible

拉曼光谱法是描述金刚石薄膜碳键合特征的最常用的方法。使鉴别金刚石、石墨和非晶碳成为可能。